Tetrakis (dimethylamino) zirconium (IV) | TDMAZ | Zr[N(CH3)2]4 | 6N
Tetrakis (dimethylamino) zirconium (IV) is precursor of ZrO2 in chemical deposition process, known as high-k insulating materials in COMS and DRAM; a resistive memory dielectric layer precursor; lithium-ion battery anode cladding deposition precursor. It is used to prepare specialty ceramics; catalyst of bridged metallocene compounds.
Name: Tetrakis (dimethylamino) zirconium (IV); TDMAZ
Chemical formula: Zr[N(CH3)2]4
Molecular weight: 267.53
CAS No.: 19756-04-8
Melting point: 57-60°C
Boiling point: 80°C
Flash point: >65 ℃
Appearance: white powder
Storage conditions: 2-8°C